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Polymeric Microneedle Array Fabrication by Photolithography
Published on: November 17, 2015
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Preparation of Microneedle Array Mold Based on MEMS Lithography Technology.
Jie Wang1, Huan Wang1, Liyan Lai1
1College of Science, Shanghai Institute of Technology, Shanghai 201418, China.
Micromachines
|December 31, 2020
Summary
This study compares three microneedle array (MNA) fabrication methods using MEMS technology. These painless, minimally invasive MNAs offer precise drug delivery and diagnostics, with reproducible accuracy between 2-11%.
Area of Science:
- Biomedical Engineering
- Materials Science
- Nanotechnology
Background:
- Microneedle arrays (MNAs) offer painless, minimally invasive transdermal drug delivery with precise dosage control.
- Existing fabrication methods have limitations in achieving desired MNA geometries and functionalities.
Purpose of the Study:
- To compare three novel microneedle array (MNA) fabrication methods using Microelectromechanical Systems (MEMS) technology.
- To evaluate the reproducibility, accuracy, and potential applications of MNAs produced via different manufacturing routes.
Main Methods:
- Fabrication of metal MNAs using the planar pattern-to-cross-section (PCT) method with LIGA (Lithography, Electroplating, Molding) technology.
- Production of PDMS quadrangular pyramid MNAs via silicon wet etching and SU-8 processing.
- Creation of PDMS conical MNAs using tilting rotary lithography on SU-8 photoresist.
Main Results:
- All three methods utilize parallel subtractive manufacturing with a reproducibility and accuracy range of 2-11%.
- LIGA-based MNAs are hollow with an aspect ratio up to 30, suitable for blood extraction and drug injection.
- Engraving and UV exposure processes yield MNAs of 600 μm and 150 μm height, respectively, for sustained release and subcutaneous stimulation.
Conclusions:
- The developed MEMS-based fabrication techniques provide versatile platforms for creating diverse microneedle array designs.
- These methods enable precise control over MNA dimensions, facilitating applications from diagnostics to systemic drug delivery.

