Enhancing the dynamic range of deformable mirrors with compression bias
Optics Express
|December 31, 2020
Abstract:
We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design principles for this class of actuator are described and a mirror with 370 mD dynamic range is demonstrated.
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