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    Optical profilers like coherence scanning interferometers can have systematic deviations. A rigorous 3D simulation model analyzes these deviations, comparing simulation and measurement for improved topography accuracy.

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    Area of Science:

    • Optical metrology
    • Surface topography measurement
    • Interferometry

    Background:

    • Optical profilers, including coherence scanning interferometers, are widely used for contactless topography measurements.
    • Measured profiles often exhibit systematic deviations due to the wave nature of light, which are not fully understood.
    • Existing models may not fully capture the complexities of image formation for 2D surface structures in 3D.

    Purpose of the Study:

    • To rigorously analyze systematic deviations in optical profiler measurements.
    • To investigate the physical relationships between measurement deviations and surface characteristics.
    • To compare the efficacy of 3D modeling versus 2D approaches for topography analysis.

    Main Methods:

    • Development and application of a rigorous 3D simulation model for optical profiler image formation.
    • Consideration of instrument transfer characteristics, object geometry, and material properties.
    • Comparison of simulation results with experimental measurements using varying polarizations, wavelengths, and interferometer types. Finite Element Method (FEM) simulations were employed using AFM data for realistic results.

    Main Results:

    • The study provides a full 3D modeling approach for image formation concerning 2D surface structures.
    • Simulation results are validated against experimental data for various surface features (edges, slopes) and materials.
    • The research highlights the advantages of 3D modeling over time-efficient 2D methods for analyzing measurement deviations.

    Conclusions:

    • Rigorous 3D simulation is crucial for accurately understanding and mitigating systematic deviations in optical topography measurements.
    • The developed model accurately predicts deviations caused by surface geometry and material properties.
    • This work advances the accuracy and reliability of contactless surface topography analysis using optical methods.