An optical beam deflection based system for multi-axis out-of-plane motion measurement at multiple points.

Area of Science:

• Optical Measurement Systems
• Mechanical Engineering
• Nanotechnology

Background:

• Accurate measurement of out-of-plane motion is critical for micro- and macro-scale targets.
• Existing systems may lack flexibility in measurement points and automated calibration.

Purpose of the Study:

• To present a novel optical beam deflection-based measurement system.
• To enable multi-axis out-of-plane motion measurement at multiple points.
• To introduce an automated calibration stage for enhanced system adaptability.

Main Methods:

• Utilized optical beam deflection for non-contact motion sensing.
• Developed an automated calibration stage to adjust measurement locations and calibrate the sensitivity matrix.
• Validated the system with rigid body rotation measurements.
• Applied the system for dynamic characterization of micro-electro-mechanical system (MEMS) micro-cantilever beams.

Main Results:

• Demonstrated accurate multi-axis out-of-plane motion measurement capabilities.
• Successfully calibrated the system's sensitivity matrix at various measurement locations.
• Obtained the first two mode shapes of a micro-cantilever beam, validating its dynamic characterization utility.

Conclusions:

• The developed optical beam deflection system offers a versatile solution for motion measurement across different scales.
• The automated calibration stage enhances the system's adaptability and accuracy.
• The system is effective for detailed dynamic analysis of micro-scale devices like MEMS.