Inorganic Materials by Atomic Layer Deposition for Perovskite Solar Cells

Organic-inorganic hybrid perovskite solar cells (PSCs) have received much attention with their rapid progress during the past decade, coming close to the point of commercialization. Various approaches in the process of PSC development have been explored with the motivation to enhance the solar cell power conversion efficiency-while maintaining good device stability from light, temperature, and moisture-and simultaneously optimizing for scalability. Atomic layer deposition (ALD) is a powerful tool in depositing pinhole-free conformal thin-films with excellent reproducibility and accurate and simple control of thickness and material properties over a large area at low temperatures, making it a highly desirable tool to fabricate components of highly efficient, stable, and scalable PSCs. This review article summarizes ALD's recent contributions to PSC development through charge transport layers, passivation layers, and buffer and recombination layers for tandem applications and encapsulation techniques. The future research directions of ALD in PSC progress and the remaining challenges will also be discussed.