Design and Characteristics of an Optofluidic Phase Modulator Based on Dielectrowetting

In this paper, an optofluidic phase modulator based on dielectrowetting is designed and fabricated to adjust the optical phase. Two liquids are filled in the device, and a transparent sheet is employed at the liquid interface to keep the interface flat. When different voltages are applied to the modulator, the flat interface moves up and down, leading to the variation of the optical phase. A theoretical model is constructed to predict the optical phase shift quantitatively, and the phase regulation ability is also tested experimentally. Our modulator realizes continuous adjustment of the optical phase in a certain range by the operation of voltage adjustment. When the voltage is increased to 150 V, the optical phase modulation range of our proposed modulator can reach 9.366 π.