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Updated: Nov 21, 2025

Implementation of a Reference Interferometer for Nanodetection
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Implementation of a Reference Interferometer for Nanodetection

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Estimation of an uncertainty budget and performance measurement for a dual-wavelength Twyman-Green interferometer

Dahi Ghareab Abdelsalam Ibrahim1

  • 1Engineering and Surface Metrology Laboratory, National Institute of Standards, El haram, El Giza, Egypt.

Journal of Microscopy
|January 14, 2021
PubMed

Keywords:
interferometrymetrologysurface measurementsunwrapping phase

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