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Evaluation of TEM specimen quality prepared by focused ion beam using symmetry breaking index of convergent-beam

Daisuke Morikawa1, Masaki Ageishi1, Kaori Sato2

  • 1Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Japan.

Microscopy (Oxford, England)
|January 15, 2021
PubMed

Keywords:
FIBconvergent-beam electron diffractioncrushing methoddegraded crystalline layerion millingsymmetry breaking index

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