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Updated: Nov 21, 2025

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
Prominent luminescence of silicon-vacancy defects created in bulk silicon carbide p-n junction diodes
Fumiya Nagasawa1, Makoto Takamura2, Hiroshi Sekiguchi2
1Rohm Research and Development Center, ROHM Co., Ltd., Kyoto, Japan. fumiya.nagasawa@dsn.rohm.co.jp.
Abstract:
We investigate fluorescent defect centers in 4H silicon carbide p-n junction diodes fabricated via aluminum-ion implantation into an n-type bulk substrate without the use of an epitaxial growth process. At room temperature, electron-irradiated p-n junction diodes exhibit electroluminescence originating from silicon-vacancy defects. For a diode exposed to an electron dose of [Formula: see text] at [Formula: see text], the electroluminescence intensity of these defects is most prominent within a wavelength range of 400-[Formula: see text]. The commonly observed [Formula: see text] emission was sufficiently suppressed in the electroluminescence spectra of all the fabricated diodes, while it was detected in the photoluminescence measurements. The photoluminescence spectra also displayed emission lines from silicon-vacancy defects.
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