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Updated: Nov 19, 2025

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Dong Li1, Qiancheng Zhao1, Jian Cui1
1National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871, People's Republic of China.
This study introduces an improved multi-phase clock (MPC) method for precise frequency measurement in microelectromechanical system sensors. The optimized MPC enhances accuracy and robustness against noise, crucial for high-precision applications.
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