Design and characterization of a low-vibration laboratory with cylindrical inertia block geometry

Many modern nanofabrication and imaging techniques require an ultra-quiet environment to reach optimal resolution. Isolation from ambient vibrations is often achieved by placing the sensitive instrument atop a massive block that floats on air springs and is surrounded by acoustic barriers. Because typical building noise drops off above 120 Hz, it is advantageous to raise the flexural resonance frequencies of the inertia block and instrument far above 120 Hz. However, it can be challenging to obtain a high fundamental frequency of the floating block using a simple rectangular design. Here, we design, construct, and characterize a vibration isolation system with a cylindrical inertia block, whose lowest resonance frequency of 249 Hz shows good agreement between finite element analysis simulation and directly measured modes. Our simulations show that a cylindrical design can achieve a higher fundamental resonance frequency than a rectangular design of the same mass.