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Updated: Nov 19, 2025

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Atomic Layer Deposition of Vanadium Dioxide and a Temperature-dependent Optical Model
Published on: May 23, 2018
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Recent Progress on Vanadium Dioxide Nanostructures and Devices: Fabrication, Properties, Applications and
Yanqing Zhang1,2, Weiming Xiong1,2, Weijin Chen1,2,3
1State Key Laboratory of Optoelectronic Materials and Technologies, School of Physics, Sun Yat-sen University, Guangzhou 510275, China.
Nanomaterials (Basel, Switzerland)
|February 2, 2021
Summary
Vanadium dioxide (VO2) exhibits a metal-insulator transition (MIT), changing properties with temperature. This review covers VO2 phases, fabrication, and applications in smart devices and sensors.
Area of Science:
- Materials Science
- Condensed Matter Physics
Background:
- Vanadium dioxide (VO2) is a metal-insulator transition (MIT) material.
- It transitions from a monoclinic insulating phase to a rutile metallic phase with increasing temperature.
- This transition involves abrupt changes in electrical and optical properties.
Purpose of the Study:
- To review the various phases and structural characteristics of VO2.
- To summarize fabrication methods for VO2 nanostructures, including thin films and low-dimensional structures (LDSs).
- To discuss the properties and applications of VO2, alongside future challenges and opportunities.
Main Methods:
- Literature review of VO2 phases, structures, and properties.
- Summary of common fabrication techniques for VO2 nanostructures.
- Analysis of VO2 applications in various devices.
Main Results:
- Detailed overview of VO2's distinct phases and structural attributes.
- Compilation of fabrication methods for VO2 thin films and low-dimensional structures.
- Exploration of VO2's utility in electric/optical devices, smart windows, sensors, and actuators.
Conclusions:
- VO2's unique MIT properties make it suitable for advanced applications.
- Further research is needed to overcome current challenges and unlock future potential.
- The review highlights opportunities for VO2 in next-generation technologies.

