Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Area of Science:

• Materials Science
• Tribology
• Thin Film Technology

Background:

• Amorphous boron carbon nitride (a-BCN) films are known for excellent mechanical properties like high hardness and wear resistance.
• The precise relationship between the structural characteristics and mechanical performance of a-BCN films remains incompletely understood.

Purpose of the Study:

• To investigate the correlation between the structure and mechanical properties of a-BCN films.
• To optimize a-BCN film synthesis for superior mechanical performance.

Main Methods:

• Films were synthesized using an arc-sputtering hybrid process under varied conditions.
• Structural and chemical analyses were performed using spectroscopy (GD-OES, XPS, FTIR, Raman).
• Mechanical properties were evaluated via nanoindentation and ball-on-disc tribometry.

Main Results:

• Mechanical properties are highly sensitive to carbon content, degrading significantly below 90%.
• Films with minimal boron and nitrogen (≤2.5 at.%) exhibit hardness and friction comparable to amorphous carbon (a-C) films.
• These optimized a-BCN films demonstrate superior wear resistance compared to a-C films.

Conclusions:

• The mechanical properties of a-BCN films are strongly influenced by their composition, particularly carbon content.
• Controlled addition of small amounts of boron and nitrogen can enhance wear resistance beyond that of pure amorphous carbon.
• Optimized a-BCN films present a promising alternative to a-C films for demanding applications.