Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror

Ulrich Kallmann1, Michael Lootze2, Ulrich Mescheder2,3

  • 1Department of Business Admin & Engineering, Furtwangen University of Applied Science, D-78120 Furtwangen, Germany.

Micromachines
|February 10, 2021
PubMed
Summary

This study presents a novel micro-electronic-mechanical system (MEMS) adaptive membrane mirror with a parabolic cylinder shape. This adaptive astigmatic mirror and its simulation model enable new optical system development.

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