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A Flexible Pressure Sensor Based on Magnetron Sputtered MoS₂.

Xing Pang¹, Qi Zhang¹, Yiwei Shao¹

¹State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China.

Sensors (Basel, Switzerland)

|February 10, 2021

Summary

This summary is machine-generated.

Magnetron sputtered molybdenum disulfide (MoS₂) thin films on flexible substrates show significant resistance changes under pressure. This research demonstrates their potential for sensitive, wearable piezoresistive pressure sensors.

Keywords:

MoS2 sensor flexible sensor magnetron sputtering piezoresistive

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Area of Science:

Materials Science
Nanotechnology
Sensor Technology

Background:

Two-dimensional (2D) layered molybdenum disulfide (MoS₂) is recognized for its electrical properties in catalysis, energy storage, and photodetection.
Limited research exists on utilizing sputtered MoS₂ for piezoresistive sensor applications.

Purpose of the Study:

To investigate the piezoresistive properties of magnetron sputtered MoS₂ films on flexible substrates.
To develop and characterize a flexible thin-film pressure sensor based on MoS₂.

Main Methods:

Fabrication of MoS₂ films on polydimethylsiloxane (PDMS) substrates using magnetron sputtering.
Characterization using scanning electron microscopy (SEM), atomic force microscopy (AFM), and chemical analysis.
Design and testing of a micro-thickness flexible pressure sensor.

Main Results:

MoS₂ films exhibited a micro-grain-like structure composed of nano-scale particles with inter-particle grooves.
Amorphous MoS₂ was successfully grown on PDMS substrates.
The sensor with a 1.5 μm PDMS substrate achieved a maximum resistance change (ΔR/R) of 70.39 and a high piezoresistive coefficient of 866.89 MPa^-1 at 0.46 MPa.
The sensor demonstrated good repeatability when used as a wearable device to measure plantar pressure.

Conclusions:

Magnetron sputtered MoS₂ thin films possess excellent piezoresistive properties suitable for flexible pressure sensors.
The developed MoS₂-based sensor exhibits high sensitivity and good performance for wearable applications.
This research highlights the potential of sputtered MoS₂ in advanced sensor technologies.