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Updated: Nov 17, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Ulrich Mescheder1,2, Michael Lootze1, Khaled Aljasem3
1Department of Mechanical & Medical Engineering, Institute for Microsystems Technology (IMST), Furtwangen University, Robert-Gerwig-Platz 1, 78120 Furtwangen, Germany.
This study evaluates a micro-opto-electromechanical system (MOEMS) with a silicon membrane for active focusing. The device demonstrates suitability for high-performance imaging with a large aperture, achieving wavefront errors between λ/5-λ/10.
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