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Electron Tomography
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Updated: Nov 17, 2025

Simultaneous Brightfield, Fluorescence, and Optical Coherence Tomographic Imaging of Contracting Cardiac Trabeculae Ex Vivo

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Principal image decomposition for multi-detector backscatter electron topography reconstruction.

Jan Neggers¹, Eva Héripré¹, Marc Bonnet²

¹MSSMat, CentraleSupélec, CNRS, Université Paris-Saclay, Gif-sur-Yvette, 91190, France.

Ultramicroscopy

|February 14, 2021

Summary

This study introduces a new method for 3D surface topography reconstruction using multiple BackScatter Electron (BSE) images from Scanning Electron Microscopes (SEMs). The technique is efficient and adaptable to various detector configurations, minimizing calibration needs.

Keywords:

Back Scatter Electron Principal Component Analysis Scanning Electron Microscopy Topography reconstruction

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Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography

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Published on: March 12, 2017

Area of Science:

Materials Science
Surface Science
Microscopy

Background:

Scanning Electron Microscopes (SEMs) produce shaded images that suggest 3D topography.
Existing shape-from-shading methods often rely on specific quad-detector setups.
SEMs frequently employ non-standard detector configurations.

Purpose of the Study:

To develop a novel method for 3D surface topography reconstruction from SEM images.
To create a generalized algorithm applicable to various BackScatter Electron (BSE) detector setups.
To reduce the calibration requirements for 3D surface reconstruction.

Main Methods:

Utilizes BackScatter Electron (BSE) images from multiple detectors.
Employs a modal decomposition of principal image components.
The algorithm identifies detector orientation as part of the reconstruction process.

Main Results:

The proposed method reconstructs 3D surface topography effectively.
The approach is efficient and works with any number or orientation of BSE detectors.
Requires minimal calibration due to integrated orientation identification.

Conclusions:

A novel, generalized method for 3D surface topography reconstruction from SEM images is presented.
The technique offers an efficient and adaptable solution for diverse SEM detector configurations.
This approach simplifies 3D surface analysis by reducing calibration dependency.