Design and Analysis of a Novel Flexure-Based Dynamically Tunable Nanopositioner

Zeying Li1, Pengbo Liu1, Peng Yan2,3

  • 1School of Mechanical & Automotive Engineering, Qilu University of Technology (Shandong Academy of Sciences), Jinan 250353, China.

Micromachines
|March 6, 2021
PubMed
Summary

This study introduces a novel flexure-based nanopositioner using magnetorheological elastomers (MREs) for dynamic tunability. The design allows for real-time adjustment of workspace, stiffness, and damping via magnetic fields, enhancing servomechanism performance.