LTCC and Bulk Zn₄B₆O₁₃-Zn₂SiO₄ Composites for Submillimeter Wave Applications

New zinc metaborate Zn₄B₆O₁₃-willemite Zn₂SiO₄ composites were investigated as promising materials for LTCC (low temperature cofired ceramics) substrates of microelectronic circuits for submillimeter wave applications. Composites were prepared as bulk ceramics and LTCC multilayer structures with cofired conductive thick films. The phase composition, crystal structure, microstructure, sintering behavior, and dielectric properties were studied as a function of willemite content (0, 10, 13, 15, 20, 40, 50, 60, 100 wt %). The dielectric properties characterization performed by THz time domain spectroscopy proved the applicability of the composites at very high frequencies. For the 87% Zn₄B₆O₁₃-13% Zn₂SiO₄ composite, the best characteristics were obtained, which are suitable for LTCC submillimeter wave applications. These were a low sintering temperature of 930 °C, compatibility with Ag-based conductors, a low dielectric constant (5.8 at 0.15-1.1 THz), a low dissipation factor (0.006 at 1 THz), and weak frequency and temperature dependences of dielectric constant.