Mechanical/Electrical Characterization of ZnO Nanomaterial Based on AFM/Nanomanipulator Embedded in SEM

ZnO nanomaterials have been widely used in micro/nano devices and structure due to special mechanical/electrical properties, and its characterization is still deficient and challenging. In this paper, ZnO nanomaterials, including nanorod and nanowire are characterized by atomic force microscope (AFM) and nanomanipulator embedded in scanning electron microscope (SEM) respectively, which can manipulate and observe simultaneously, and is efficient and cost effective. Surface morphology and mechanical properties were observed by AFM. Results showed that the average Young's modulus of ZnO nanorods is 1.40 MPa and the average spring rate is 0.08 N/m. Electrical properties were characterized with nanomanipulator, which showed that the ZnO nanomaterial have cut-off characteristics and good schottky contact with the tungsten probes. A two-probe strategy was proposed for piezoelectric property measurement, which is easy to operate and adaptable to multiple nanomaterials. Experiments showed maximum voltage of a single ZnO nanowire is around 0.74 mV. Experiment criteria for ZnO manipulation and characterization were also studied, such as acceleration voltage, operation duration, sample preparation. Our work provides useful references for nanomaterial characterization and also theoretical basis for nanomaterials application.