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Updated: Nov 14, 2025

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
Published on: March 24, 2023
Enhanced piezocapacitive response in zinc oxide tetrapod-poly(dimethylsiloxane) composite dielectric layer for
Gen-Wen Hsieh1, Shih-Rong Ling, Fan-Ting Hung
1Institute of Lighting and Energy Photonics, College of Photonics, National Chiao Tung University, 301, Gaofa 3rd Road, Guiren District, Tainan 71150, Taiwan, Republic of China. cwh31@nctu.edu.tw.
Abstract:
We demonstrate polymeric piezocapacitive pressure sensors based on a novel composite dielectric film of poly(dimethylsiloxane) elastomeric silicone and zinc oxide tetrapod. With an appropriate loading of zinc oxide tetrapods, composite piezocapacitive pressure sensors show a 75-fold enhancement of pressure sensitivity over pristine devices, achieving a marked value as high as 2.55 kPa-1. The limit of detection was estimated to be about 10 mg, corresponding to a subtle stimulus of only 1.0 Pa. Besides, versatile functionalities such as detection of finger bending/straightening, calligraphy writing, and air flow blowing have been investigated. It is expected that the proposed piezocapacitive pressure sensors incorporating stress-sensitive additives of zinc oxide nanostructures may provide a promising means for potential applications in ultrasensitive wearable, healthcare systems and human-machine interfaces.

