Perspectives on C-MEMS and C-NEMS biotech applications

Shahrzad Forouzanfar1, Nezih Pala1, Marc Madou2

  • 1Electrical and Computer Engineering, Florida International University, United States.

Summary

Carbon microelectromechanical systems (C-MEMS) and nanoelectromechanical systems (C-NEMS) show great promise for biotech applications. This review covers their fabrication, current state, challenges, and future opportunities in areas like biosensors and neural probes.

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