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Updated: Nov 12, 2025

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Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
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Optoelectromechanical phase shifter with low insertion loss and a 13π tuning range
Optics Express
|March 17, 2021
Summary
We developed a new silicon nitride optomechanical phase shifter. This device offers low insertion loss and low half-wave voltage, enabling MHz operation and fast optical pulse generation.
Area of Science:
- Photonics
- Optoelectronics
- Nanophotonics
Background:
- Integrated photonic devices are crucial for optical communication and signal processing.
- Existing phase shifters often face trade-offs between performance metrics like insertion loss, voltage, and speed.
- Optomechanical devices offer a promising route to novel functionalities in integrated photonics.
Purpose of the Study:
- To present an on-chip optomechanical phase shifter with enhanced performance.
- To demonstrate low insertion loss and low half-wave voltage using a silicon nitride platform.
- To explore the potential for high-speed operation and pulse generation.
Main Methods:
- Fabrication of a phase shifter based on a slot waveguide on a silicon nitride platform.
- Utilizing electrostatic displacement of mechanical structures to modulate the effective refractive index.
- Characterization of insertion loss, extinction ratio, half-wave voltage, and phase shift capabilities.
- Assessment of device operational frequency and pulse generation characteristics.
Main Results:
- Achieved insertion loss below 0.5 dB at 1550 nm.
- Demonstrated a low half-wave voltage (Vπ = 2.0 V) and 2π phase shift (V2π = 2.7 V).
- Measured phase shifts up to 13.3π at 17 V.
- Confirmed MHz range operation and capability for sub-microsecond pulse generation.
Conclusions:
- The developed silicon nitride optomechanical phase shifter offers a compelling combination of low loss, low voltage, and high speed.
- This device represents a significant advancement for integrated photonic applications requiring fast phase modulation.
- The demonstrated performance opens avenues for high-performance optical signal processing and generation of ultrafast optical pulses.
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