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A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging.

Haoran Wang1, Zhenfang Chen2, Hao Yang3

  • 1Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611 USA.

Journal of Microelectromechanical Systems : a Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems
|March 22, 2021
PubMed
Summary

This study introduces a novel compact piezoelectric micromachined ultrasonic transducer (pMUT) array for photoacoustic imaging. The unique design utilizes a thick ceramic PZT, enabling enhanced performance in imaging applications.

Keywords:
Ceramic PZTEndoscopic ImagingMicroelectromechanical SystemsPMUT ArrayPhotoacoustic ImagingPiezoelectric Micromachined Ultrasonic Transducers

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Area of Science:

  • Materials Science
  • Biomedical Engineering
  • Acoustics

Background:

  • Photoacoustic imaging offers non-invasive visualization capabilities.
  • Piezoelectric micromachined ultrasonic transducers (pMUTs) are crucial for generating and detecting ultrasound waves.
  • Developing compact and high-performance pMUT arrays is essential for advancing imaging technologies.

Purpose of the Study:

  • To design, fabricate, and characterize a novel compact 4x4 pMUT array.
  • To integrate a thick ceramic PZT layer for improved piezoelectric properties.
  • To demonstrate the application of the pMUT array in photoacoustic imaging.

Main Methods:

  • Design and fabrication of a 4x4 pMUT array with a 4 μm-thick ceramic PZT.
  • Characterization using electrical impedance measurements and acoustic sensing.
  • Demonstration of photoacoustic imaging on an agar phantom with embedded pencil lead.

Main Results:

  • A compact pMUT array (1.8 × 1.6 mm²) with 210 μm diameter elements was successfully fabricated.
  • The use of thick ceramic PZT resulted in higher piezoelectric coefficients and lower stress.
  • Successful photoacoustic imaging of a phantom was achieved, validating the array's functionality.

Conclusions:

  • The developed compact pMUT array with integrated ceramic PZT shows significant potential for photoacoustic imaging.
  • The high piezoelectric performance of the ceramic PZT contributes to the array's effectiveness.
  • This technology advancement could lead to more sensitive and portable photoacoustic imaging systems.