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Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures
Published on: December 5, 2015
Youngjun Kim1, Whang Je Woo1, Donghyun Kim1
1School of Electrical and Electronic Engineering, Yonsei University, 50 Yonsei-Ro, Seodaemun-Gu, Seoul, 03722, Republic of Korea.
Atomic layer deposition (ALD) enables industry-compatible synthesis and property modulation of 2D transition metal chalcogenides (TMCs). This research explores ALD-based TMCs for advanced nanoelectronics, sensors, and energy applications.
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