A Hybrid Fuzzy Decision Model for Evaluating MEMS and IC Integration Technologies

Qian-Yo Lee1, Ming-Xuan Lee2, Yen-Chun Lee3

  • 1Department of Biomechatronic Engineering, National Chiayi University, No. 300, Syuefu Rd., Chiayi City 600355, Taiwan.

Micromachines
|April 3, 2021
PubMed
Summary

A new hybrid fuzzy multi-criteria decision making (MCDM) model effectively ranks microelectromechanical systems (MEMS) and integrated circuit (IC) integration technologies. Development schedule and manufacturing capability are key criteria, favoring 3D system-in-package (SiP) and monolithic system-on-chip (SoC).

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