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Updated: Nov 10, 2025

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
A Hybrid Fuzzy Decision Model for Evaluating MEMS and IC Integration Technologies
Qian-Yo Lee1, Ming-Xuan Lee2, Yen-Chun Lee3
1Department of Biomechatronic Engineering, National Chiayi University, No. 300, Syuefu Rd., Chiayi City 600355, Taiwan.
A new hybrid fuzzy multi-criteria decision making (MCDM) model effectively ranks microelectromechanical systems (MEMS) and integrated circuit (IC) integration technologies. Development schedule and manufacturing capability are key criteria, favoring 3D system-in-package (SiP) and monolithic system-on-chip (SoC).
Area of Science:
- * Engineering and Materials Science
- * Decision Science and Artificial Intelligence
Background:
- * The increasing integration of microelectromechanical systems (MEMS) with integrated circuits (IC) is crucial for the Internet of Things (IoT).
- * Evaluating and selecting optimal MEMS-IC integration technologies presents a complex decision-making challenge.
- * Existing methods may not adequately address the inherent uncertainties and multiple criteria in technology selection.
Purpose of the Study:
- * To propose a hybrid fuzzy multi-criteria decision making (MCDM) model for evaluating MEMS and IC integration technologies.
- * To rank alternative MEMS-IC integration technologies based on defined criteria within a fuzzy environment.
- * To provide a strategic framework for selecting future MEMS-IC integration technologies.
Main Methods:
- * Development of a hybrid fuzzy MCDM model combining Fuzzy Analytic Hierarchy Process (AHP) and Fuzzy VIKOR methods.
- * Identification of six key evaluation criteria and five major alternative technologies through literature review and expert input.
- * Fuzzy AHP used to determine criterion weights; Fuzzy VIKOR applied for ranking the alternative technologies.
Main Results:
- * Empirical results indicate that 'development schedule' and 'manufacturing capability' are the most significant criteria.
- * The top-ranked technologies are 3D (three-dimensional) System-in-Package (SiP) and monolithic System-on-Chip (SoC).
- * The proposed model successfully ranks technologies in a fuzzy decision-making context.
Conclusions:
- * The hybrid fuzzy MCDM model offers an effective approach for strategic technology evaluation and selection.
- * The findings highlight critical factors for successful MEMS-IC integration.
- * The model serves as a valuable reference for researchers and industry professionals in the field of MEMS-IC integration.
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