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Related Concept Videos

Electronic Distance Measuring Instruments01:30

Electronic Distance Measuring Instruments

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Electronic Distance Measuring Instruments (EDMs) are essential tools in modern surveying, offering precise distance measurements by emitting electromagnetic signals and calculating the time required for these signals to travel to a target and return. Two primary types of signals are used in EDMs — light waves and microwaves — each suited to specific environmental and distance requirements. Light-wave-based EDMs utilize either infrared or laser light, providing high accuracy over...
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Related Experiment Video

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An Experimental Protocol for Assessing the Performance of New Ultrasound Probes Based on CMUT Technology in Application to Brain Imaging
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A Novel Ultrasonic TOF Ranging System Using AlN Based PMUTs.

Yihsiang Chiu1, Chen Wang1, Dan Gong2

  • 1School of Electronic and Computer Engineering Bldg. A, Peking University Shenzhen Graduate School, University Town, Xili, Nanshan, Shenzhen 518055, China.

Micromachines
|April 3, 2021
PubMed
Summary

This study introduces a highly accurate ultrasonic ranging system using aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducers (PMUTs) and time-of-flight (TOF) measurements. The system achieves precise distance measurements, making AlN PMUTs ideal for portable devices.

Keywords:
aluminum nitridepiezoelectric micromachined ultrasonic transducersrangingtime of flight (TOF)time to digital converter circuit (TDC)

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Acoustics

Background:

  • Ultrasonic ranging systems are crucial for various applications requiring precise distance measurement.
  • Existing systems often face limitations in accuracy, range, or portability.
  • Aluminum Nitride (AlN) based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) offer potential for miniaturization and high performance.

Purpose of the Study:

  • To develop and evaluate a high-accuracy ultrasonic ranging system.
  • To investigate the performance of AlN-based PMUTs in an air-coupled ranging application.
  • To demonstrate the feasibility of an integrated, portable ranging solution.

Main Methods:

  • Simulation and analysis of PMUT mode shape and time-frequency characteristics.
  • Utilization of two air-coupled AlN PMUTs (97 kHz and 96 kHz) for transmission and reception.
  • Implementation of a Time to Digital Converter (TDC) circuit for Time of Flight (TOF) calculation.
  • Design and fabrication of an Application Specific Integrated Circuit (ASIC) using a 0.18 μm CMOS process.

Main Results:

  • The system accurately measures ranges up to 50 cm.
  • An average error of 0.63 mm was achieved, demonstrating high precision.
  • The developed system offers a wide measurement range and superior accuracy compared to existing technologies.
  • The ASIC successfully acquired data from the PMUTs.

Conclusions:

  • AlN-based PMUTs are a highly promising technology for integrated ultrasonic ranging systems.
  • The developed CMOS-driven system provides a robust platform for portable and accurate distance measurement.
  • This work advances the state-of-the-art in ultrasonic sensing for compact applications.