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This study presents a novel microelectromechanical system (MEMS) integrating a three-axis magnetometer and accelerometer. The device achieves high sensitivity and resolution, limited by circuit noise and Brownian motion.

Keywords:
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Area of Science:

  • Microelectromechanical Systems (MEMS)
  • Integrated Circuit Design
  • Sensor Technology

Background:

  • Development of miniaturized, multi-function sensors is crucial for advanced applications.
  • Existing MEMS magnetometers and accelerometers often require separate fabrication or complex integration.
  • Need for high-resolution, low-noise sensing solutions in compact form factors.

Purpose of the Study:

  • To implement a multi-function MEMS device combining three-axis magnetometer (MAG) and three-axis accelerometer (ACC) functions.
  • To optimize readout circuitry for enhanced sensitivity and resolution.
  • To characterize the performance of the integrated MEMS sensor.

Main Methods:

  • Fabrication using a 0.18 μm CMOS process compatible with application-specific integrated circuits (ASICs).
  • Implementation of advanced readout techniques including nested chopper, correlated double-sampling (CDS), noise reduction, frequency division multiplexing, and time-division multiplexing.
  • Excitation of the MEMS magnetometer at mechanical resonant frequencies and characterization of sensitivities and resolutions.

Main Results:

  • Achieved in-plane and out-of-plane mechanical quality factors of 471-500 and 971-1000, respectively, with die-level vacuum packaging.
  • Reported magnetometer sensitivity of 7.1-10.7 uV/uT and accelerometer sensitivity of 58.37-88.87 uV/ug.
  • Demonstrated magnetometer resolution of 44.06-87.46 nT/√Hz and accelerometer resolution of 5.043-7.5 ng/√Hz.

Conclusions:

  • Successfully integrated a multi-function MEMS MAG and ACC sensor using a standard CMOS process.
  • The sensor's resolution is primarily limited by circuit noise equivalent acceleration (CNEM) and Brownian noise equivalent magnetic field (BNEM).
  • The developed MEMS sensor offers a promising solution for applications requiring simultaneous magnetic field and acceleration measurements with high precision.