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Updated: Nov 10, 2025

Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment
Published on: November 9, 2015
Hydrophobic/Oleophilic Structures Based on MacroPorous Silicon: Effect of Topography and Fluoroalkyl Silane
Pilar Formentín1, Lluís F Marsal1
1Departament d'Enginyeria Electrònica, Elèctrica i Automàtica, Universitat Rovira i Virgili, Avinguda Països Catalans, 26 43007 Tarragona, Spain.
Abstract:
The effect of the morphology and chemical composition of a surface on the wettability of porous silicon structures is analyzed in the present work. Hydrophobic and superhydrophobic macroporous substrates are attractive for different potential applications. Herein, different hydrophobic macroporous silicon structures were fabricated by the chemical etching of p-type silicon wafers in a solution based on hydrofluoric acid and coated with a fluoro silane self-assembled monolayer. The surface morphology of the final substrate was characterized using a scanning electron microscope. The wettability was assessed from contact angle measurements using water and organic solvents that present low surface energy. The experimental data were compared with the classical wetting states theoretical models described in the literature. Perfluoro-silane functionalized macroporous silicon surfaces presented systematically higher contact angles than untreated silicon substrates. The influence of porosity on the surface wettability of macoporous silicon structures has been established. These results suggest that the combination of etching conditions with a surface chemistry modification could lead to hydrophobic/oleophilic or superhydrophobic/oleophobic structures.

