Investigation of Cylindrical Piezoelectric and Specific Multi-Channel Circular MEMS-Transducer Array Resonator of Ultrasonic Ablation
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Updated: Nov 10, 2025

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Jian-Chiun Liou1, Chih-Wei Peng1, Zhen-Xi Chen1
1Department of Biomedical Engineering, School of Biomedical Engineering, Taipei Medical University, Taipei 11031, Taiwan.
Background:
A cylindrical piezoelectric element and a specific multi-channel circular microelectromechanical systems (MEMS)-transducer array of ultrasonic system were used for ultrasonic energy generation and ablation. A relatively long time is required for the heat to be conducted to the target position. Ultrasound thermal therapy has great potential for treating deep hyperplastic tissues and tumors, such as breast cancer and liver tumors.
Methods:
Ultrasound ablation technology produces thermal energy by heating the surface of a target, and the heat gradually penetrates to the target's interior. Beamforming was performed to observe energy distribution. A resonance method was used to generate ablation energy for verification. Energy was generated according to the coordinates of geometric graph positions to reach the ablation temperature.
Results:
The mean resonance frequency of Channels 1-8 was 2.5 MHz, and the cylindrical piezoelectric ultrasonic element of Channel A was 4.2546 Ω at 5.7946 MHz. High-intensity ultrasound has gradually been applied in clinical treatment. Widely adopted, ultrasonic hyperthermia involves the use of high-intensity ultrasound to heat tissues at 42-45 °C for 30-60 min.
Conclusion:
In the ultrasonic energy method, when the target position reaches a temperature that significantly reduces the cell viability (46.9 °C), protein surface modification occurs on the surface of the target.
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