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Design and Application of MEMS-Based Hall Sensor Array for Magnetic Field Mapping.

Chia-Yen Lee1, Yu-Ying Lin2, Chung-Kang Kuo1

  • 1Institute of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, Taiwan.

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Summary

This study presents a magnetic field measurement system using an array of Hall sensors fabricated with microelectromechanical systems (MEMS) technology. The system accurately maps magnetic field distributions, demonstrating its potential for precise magnetic field sensing applications.

Keywords:
MEMShall effecthall sensorion implantationsensor array

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Physics

Background:

  • Magnetic field measurement is crucial in various scientific and engineering disciplines.
  • Conventional magnetic field sensors often have limitations in resolution and spatial mapping capabilities.
  • Microelectromechanical systems (MEMS) offer a pathway to miniaturized and integrated sensing solutions.

Purpose of the Study:

  • To propose and demonstrate a magnetic field measurement system utilizing an array of Hall sensors.
  • To investigate the performance characteristics of Hall sensors with varying detection zone sizes.
  • To validate the system's capability in mapping magnetic field distributions using a 2D sensor array.

Main Methods:

  • Fabrication of Hall sensors using conventional microelectromechanical systems (MEMS) techniques on a P-type silicon substrate.
  • Design of cross-shaped detection zones with identical aspect ratios but varying sizes (S, M, L, XL).
  • Assembly of a 3x3 array of Hall sensors in a 3D-printed frame for 2D magnetic field mapping.

Main Results:

  • Hall sensors exhibited similar sensitivities and response times across different sizes.
  • Offset voltage was found to increase with the size of the Hall sensor's detection zone.
  • The 3x3 sensor array successfully generated 2D magnetic field contour maps, accurately reflecting magnet positions and field patterns.

Conclusions:

  • The proposed MEMS-based Hall sensor array system is effective for magnetic field measurement and spatial mapping.
  • The system demonstrates accurate reconstruction of magnetic field distributions and magnet localization.
  • This technology holds promise for advanced magnetic sensing applications requiring high spatial resolution.