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Low-loss c-axis oriented Zn0.72Mg0.28O nonlinear planar optical waveguides on silicon
Optics Express
|April 6, 2021
Summary
Highly c-axis oriented Zinc Magnesium Oxide (ZnMgO) thin films show promise for nonlinear planar waveguides and electro-optic modulators. Optimized ZnMgO films exhibit significantly enhanced nonlinear optical properties, paving the way for on-chip optical interconnects.
Area of Science:
- Materials Science
- Optoelectronics
- Solid State Physics
Background:
- Development of novel materials for integrated photonics is crucial for advancing optical interconnects.
- Zinc Oxide (ZnO) based materials offer potential for nonlinear optical applications but require optimization for device integration.
Purpose of the Study:
- To develop a material platform of highly c-axis oriented Zinc Magnesium Oxide (ZnMgO) thin films for nonlinear planar waveguides and electro-optic modulators on Silicon (Si).
- To investigate the influence of Magnesium (Mg) content on film quality and nonlinear optical properties.
- To evaluate the performance of ZnMgO based waveguides for on-chip optical applications.
Main Methods:
- Fabrication of c-axis oriented Zn1-xMgxO thin films.
- Second harmonic generation (SHG) measurements.
- Maker-fringe analysis for nonlinear susceptibility determination.
- Propagation loss measurements in slab waveguides at 633 nm wavelength.
Main Results:
- Optimized Mg content in ZnMgO films significantly enhances film growth quality.
- The second-order nonlinear susceptibility tensor element χ33 of annealed Zn0.72Mg0.28O is approximately 4.2 times larger than that of ZnO.
- Low propagation losses of 0.68 ± 0.09 dB/cm (TE0) and 0.48 ± 0.03 dB/cm (TM0) were achieved for annealed Zn0.72Mg0.28O/SiO2 slab waveguides.
Conclusions:
- Highly c-axis oriented Zn0.72Mg0.28O thin films provide a promising material platform for nonlinear planar waveguides.
- The enhanced nonlinear optical properties and low propagation losses indicate significant potential for on-chip optical interconnects.
- This work demonstrates a viable route for integrating advanced nonlinear optical functionalities onto Silicon photonic platforms.

