Design of a Short-Beam Linear Traveling-Wave Piezoelectric Motor

Area of Science:

• Mechanical Engineering
• Materials Science
• Electrical Engineering

Background:

• Piezoelectric motors offer precise motion control.
• Traditional designs face limitations in speed and efficiency.
• Traveling wave (TW) generation is key for enhanced piezoelectric motor performance.

Purpose of the Study:

• To design and implement a straight short-beam linear piezoelectric motor.
• To investigate the performance of a linear piezoelectric motor stage.
• To achieve high speed and submicrometer positioning resolution.

Main Methods:

• Constructed a short-beam linear piezoelectric motor with two sets of ceramic actuators.
• Utilized a two-phase circuit with a π/4 phase difference to generate a traveling wave (TW).
• Incorporated a wave-reduction mechanism to minimize reflection and preserve TW.
• Integrated the motor onto a guide slider to form a linear stage.

Main Results:

• Estimated ideal output speed of 169 mm/s at 300 Vpp and 45.49 kHz.
• Measured propulsion force of 4.8 N and speed of 56 mm/s under preload.
• Achieved submicrometer-scale position resolution in the linear stage.

Conclusions:

• The developed short-beam linear piezoelectric motor effectively generates traveling waves.
• The implemented linear stage demonstrates high propulsion force, speed, and precision.
• This design offers a promising solution for advanced linear motion applications.