Tuneable in-situ nanoCT workflow using FIB/SEM.

Area of Science:

• Materials Science
• Microscopy
• Imaging Technology

Background:

• Standard computed tomography (CT) lacks the resolution for nanoscale imaging.
• Existing FIB-SEM systems are not optimized for integrated 3D X-ray imaging workflows.

Purpose of the Study:

• To develop and validate a new 3D X-ray imaging method within a FIB-SEM system.
• To achieve nanoscale resolution for imaging diverse sample types.

Main Methods:

• Integration of a TEM-like specimen stage (CompuStage) with in-lens STEM detection.
• Utilizing a nanomanipulator (EasyLift) for in-situ sample transfer and a pixelated Timepix X-ray detector.
• Employing dual rotational movements (α-tilt and β-tilt) for circular CT scans and in-situ target/sample preparation.
• Adapting standard microCT reconstruction algorithms for nanoCT data.

Main Results:

• Achieved ultimate resolution in the tens of nanometers for semiconductor samples using titanium and tungsten targets.
• Demonstrated applicability to life sciences with a silver target, resolving structures in mouse brain and bone canaliculi.
• Noise-free radiography with energy filtration provided high-quality data.

Conclusions:

• The proposed FIB-SEM integrated 3D X-ray imaging method offers an unprecedented workflow for nanoscale imaging.
• The system's flexibility and in-situ capabilities allow for precise control and preparation of samples and targets.
• This technique opens new possibilities for high-resolution 3D structural analysis in materials science and life sciences.