Scanning Electron Microscopy
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Updated: Nov 7, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Qiang Wang1,2, Weimin Wang3,4, Xuye Zhuang5
1State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.
This study introduces a novel 2D micro raster scanner using Microelectromechanical Systems (MEMS) technology. The scanner achieves a wide optical Field-of-View (FoV) for applications like Light Detection and Ranging (LiDAR).
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