Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

Area of Science:

• Optoelectronics
• Mechanical Engineering
• Materials Science

Background:

• Microelectromechanical System (MEMS)-based scanning mirrors are crucial optical components offering miniaturization and cost-effectiveness.
• The burgeoning field of Light Detection and Ranging (LiDAR) presents both new avenues and technical hurdles for MEMS scanner development.

Purpose of the Study:

• To propose and demonstrate a novel 2D electrostatically actuated micro raster scanner with a large aperture.
• To investigate the mechanical coupling and resonant frequency of the scanner's dual-axis actuation system.

Main Methods:

• Design and fabrication of a 2D MEMS scanner utilizing in-plane and vertical comb drives for resonant and quasistatic scanning axes, respectively.
• Derivation of an analytic formula for resonant axis frequency, validated against finite element simulations.
• Prototype fabrication and experimental testing to evaluate performance.

Main Results:

• A 2D scanner design was successfully implemented, combining resonant and quasistatic scanning mechanisms.
• An analytic formula for resonant frequency was derived and confirmed through simulations.
• The fabricated prototype achieved a significant optical Field-of-View (FoV) of approximately 60° × 4°.

Conclusions:

• The developed 2D MEMS scanner demonstrates a viable solution for applications requiring wide angular scanning.
• The study provides a foundation for further optimization and enhanced performance of MEMS-based scanning systems.
• The proposed design addresses key challenges in MEMS scanner technology for advanced optical systems.