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The Design, Simulation and Fabrication of an Omnidirectional Inertial Switch with Rectangular Suspension Spring

Wenguo Chen1, Rui Wang1, Huiying Wang1

  • 1The College of Information Engineering, Qujing Normal University, Qujing 655000, China.

Micromachines
|April 30, 2021
PubMed

Keywords:
MEMScontact timeinertial micro-switchrectangular suspension springsurface micromachining

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