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3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software.

Ruth Yadira Vidana Morales^1,2, Susana Ortega Cisneros¹, Jose Rodrigo Camacho Perez²

¹CINVESTAV-IPN Unidad Guadalajara, Av. del Bosque 1145, El Bajío, Zapopan 45017, Mexico.

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Summary

3D Finite Element (FEM) simulations of Film Bulk Acoustic Resonators (FBAR) using OnScale predict and enhance device performance. This approach reduces design time and manufacturing cycles by validating simulations against real devices.

Keywords:

3D simulation acoustic wave resonator cloud computing design techniques finite element method onscale simulation validation

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Area of Science:

Electrical Engineering
Materials Science
Acoustics

Background:

Film Bulk Acoustic Resonators (FBAR) are critical components in modern electronic devices.
Optimizing FBAR performance requires accurate predictive modeling.
Traditional design cycles can be lengthy and costly.

Purpose of the Study:

To analyze FBAR using 3D Finite Element (FEM) simulations.
To predict and improve FBAR performance and quality before manufacturing.
To validate simulation results against a manufactured FBAR device.

Main Methods:

Utilized OnScale software for 3D FEM simulations.
Employed High-Performance Computing (HPC) cloud services for simulation speed.
Investigated challenges such as boundary conditions, mesh tuning, and loss source tracing.

Main Results:

3D FEM simulations accurately predict FBAR performance.
Simulation results were validated against experimental data.
Identified key factors influencing device quality and performance.

Conclusions:

OnScale's FEM solver enables advanced FBAR analysis and design optimization.
3D simulations significantly reduce design time and manufacturing iterations.
This simulation-driven approach offers unprecedented capabilities for FBAR development.