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Applying Dynamic Strain on Thin Oxide Films Immobilized on a Pseudoelastic Nickel-Titanium Alloy
Published on: July 28, 2020
Evaporation of Ti/Cr/Ti Multilayer on Flexible Polyimide and Its Application for Strain Sensor
Yu-Jen Hsiao1, Ru-Li Lin1, Hwi-Ming Wang2
1Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan 710, Taiwan.
Abstract:
A flexible Ti/Cr/Ti multilayer strain gauge have been successfully developed based on polyimide substrate. The pure Ti metal strain gauge have shown the hysteresis phenomenon at the relationship between resistance and strain during tensile test. The experimental results of multilayer strain gauge show that adding Cr interlayer can improve the recovery and stability of the sensing electrode. When the interlayer Cr thickness was increased from 0 to 70 nm, the resistance decreased from 27 to 8.8 kΩ. The gauge factor (GF) value also decreased from 4.24 to 2.31 with the increase in the thickness of Cr interlayer from 30 to 70 nm, and the hysteresis phenomenon disappeared gradually. The multilayer Ti/Cr/Ti film has feasible application for strain sensor.
