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Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe
Fan Zhang1, Qing Yang2, Hao Bian1
1State Key Laboratory for Manufacturing System Engineering, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Abstract:
A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76-20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices.
