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CSRR-SICW High Sensitivity High Temperature Sensor Based on Si3N4 Ceramics.

Shujing Su1, Ting Ren1, Lili Zhang1

  • 1Science and Technology on Electronic Test & Measurement Laboratory, North University of China, No.3 Xueyuan Road, Taiyuan 030051, China.

Micromachines
|April 30, 2021
PubMed
Summary

A novel wireless passive sensor using a complementary split ring resonator and substrate integrated circular waveguide (CSRR-SICW) structure offers high-temperature sensing. This high-sensitivity sensor demonstrates significant improvements over existing technologies for harsh environments.

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Sensor Technology

Background:

  • Harsh environments like aero-engines require robust, real-time temperature monitoring.
  • Existing high-temperature sensors often lack the necessary sensitivity or durability.

Purpose of the Study:

  • To design and validate a new wireless passive, high-sensitivity, high-temperature sensor.
  • To enable real-time temperature testing in challenging aero-engine conditions.

Main Methods:

  • Developed a sensor utilizing a complementary split ring resonator and substrate integrated circular waveguide (CSRR-SICW) structure.
  • Employed high-temperature resistant Si3N4 ceramic as the substrate material.
  • Monitored the resonant frequency shift of the sensor to determine temperature based on dielectric constant changes.
Keywords:
CSRR-SICWSi3N4 ceramicshigh sensitivityhigh temperature sensorwireless

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Main Results:

  • The sensor demonstrated a resonant frequency decrease from 11.3392 GHz to 11.0648 GHz across 50-1000 °C.
  • Achieved sensitivities of 123 kHz/°C (50-450 °C) and 417 kHz/°C (450-1000 °C), with an average of 289 kHz/°C.
  • The average test sensitivity is approximately double that of previously reported sensors, with significantly higher sensitivity in the upper temperature range.

Conclusions:

  • The proposed CSRR-SICW sensor exhibits high sensitivity and reliability for high-temperature measurements.
  • This technology shows significant promise for real-time temperature monitoring in demanding environments like aero-engines.