Related Experiment Video
Updated: Nov 7, 2025
08:39
Shaping the Amplitude and Phase of Laser Beams by Using a Phase-only Spatial Light Modulator
Published on: January 28, 2019
10.1K
Analog Spatial Light Modulators Based on Micromirror Arrays
Ulrike Dauderstädt1, Peter Dürr1, Andreas Gehner1
1Fraunhofer IPMS, Maria-Reiche-Straße 2, 01109 Dresden, Germany.
Micromachines
|April 30, 2021
Abstract:
The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization.
