Is Poly(methyl methacrylate) (PMMA) a Suitable Substrate for ALD?: A Review

Marta Adriana Forte1, Ricardo Manuel Silva2, Carlos José Tavares1

  • 1CF-UM-UP, Centre of Physics of Minho and Porto Universities, Campus of Azurém, University of Minho, 4800-058 Guimarães, Portugal.

Polymers
|April 30, 2021
PubMed
Summary

This review explores using poly (methyl methacrylate) (PMMA) with atomic layer deposition (ALD) for advanced materials. It highlights overcoming PMMA