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Vertical cavity capacitive transducer.

Goksen G Yaralioglu1, A Sanli Ergun2, Ayhan Bozkurt3

  • 1Ozyegin University, 34794 Cekmekoy/Istanbul, Turkey.

The Journal of the Acoustical Society of America
|May 4, 2021
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Summary

This study introduces a novel vertical cavity capacitive micromachined ultrasonic transducer (CMUT) design. This innovation overcomes the sensitivity trade-off in conventional CMUTs, enhancing both input and output performance for broader applications.

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Area of Science:

  • MEMS (Micro-Electro-Mechanical Systems)
  • Ultrasonic Transducer Technology
  • Acoustic Device Engineering

Background:

  • Capacitive micromachined ultrasonic transducers (CMUTs) offer advantages like wide bandwidth and monolithic integration.
  • A key limitation of CMUTs is the trade-off between input and output sensitivity, often requiring sub-micron gaps that restrict device performance.
  • Achieving adequate receive sensitivity necessitates high electric field intensity, which conflicts with the need for larger device strokes for higher output pressure.

Purpose of the Study:

  • To propose and evaluate a novel CMUT design that overcomes the inherent sensitivity trade-off.
  • To enhance both the receive sensitivity and output pressure capabilities of CMUT devices.
  • To provide a theoretical, analytical, and experimental validation of the proposed CMUT architecture.

Main Methods:

  • Design and theoretical analysis of a CMUT with a vertical cavity structure.
  • Analytical modeling to compare the performance of the proposed CMUT against conventional designs.
  • Development of a micro-fabrication process for the novel CMUT.
  • Experimental testing of a millimeter-scale prototype for proof-of-concept validation.

Main Results:

  • The proposed vertical cavity CMUT design effectively decouples gap height from device stroke.
  • Theoretical and analytical models predict improved performance compared to conventional CMUTs.
  • Successful micro-fabrication and testing of a prototype demonstrate the feasibility of the concept.

Conclusions:

  • The vertical cavity CMUT architecture presents a viable solution to the sensitivity-stroke trade-off in conventional CMUTs.
  • This design innovation holds potential for advancing CMUT applications requiring both high sensitivity and significant output pressure.
  • Further research and development could lead to optimized designs for specific ultrasonic applications.