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Updated: Nov 6, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
All-optical phase control in nanophotonic silicon waveguides with epsilon-near-zero nanoheaters
Jorge Parra1, Wolfram H P Pernice2, Pablo Sanchis3
1Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera s/n, 46022, Valencia, Spain.
Abstract:
A wide variety of nanophotonic applications require controlling the optical phase without changing optical absorption, which in silicon (Si) photonics has been mostly pursued electrically. Here, we investigate the unique light-matter interaction exhibited by epsilon-near-zero (ENZ) materials for all-optical phase control in nanophotonic silicon waveguides. Thermo-optic all-optical phase tuning is achieved using an ENZ material as a compact, low-loss, and efficient optical heat source. For a 10-[Formula: see text]m-long ENZ/Si waveguide, insertion loss below 0.5 dB for the transverse electric (TE) polarization is predicted together with a high control efficiency of [Formula: see text] [Formula: see text]. Our proposal provides a new approach to achieve all-optical, on-chip, and low-loss phase tuning in silicon photonic circuits.

