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Updated: Nov 5, 2025

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Global optimization of an encapsulated Si/SiO[Formula: see text] L3 cavity with a 43 million quality factor
1Institute of Physics, École Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland.
Abstract:
We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of [Formula: see text], which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.
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