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Related Experiment Video

Updated: Nov 5, 2025

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

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Extensive-dynamic-range and high-resolution surface profiling with phase-sensitive spectral-domain white-light

Zhicheng Jiao, Yunfei Jiang, Yuqian Zhao

|May 13, 2021

Summary

This summary is machine-generated.

This study introduces a Fourier-transform method for high-resolution surface profiling. It achieves nanometer-scale displacement measurement with a multi-millimeter dynamic range using spectral-domain white-light interferometry.

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Area of Science:

Optics and Photonics
Metrology
Surface Science

Background:

Accurate surface profiling is crucial for manufacturing and research.
Traditional interferometry methods often face limitations in dynamic range or resolution.

Purpose of the Study:

To present a novel Fourier-transform-based method for surface profiling.
To achieve extensive dynamic range and high resolution in displacement measurements.

Main Methods:

Utilizing phase-sensitive spectral-domain white-light interferometry.
Combining frequency and phase information of interference fringes.
Employing Fourier-transform analysis for data processing.

Main Results:

Demonstrated nanometer-scale resolution for displacement measurement.
Achieved a dynamic range of up to several millimeters.
Successfully profiled surfaces of diverse objects including coins, gauge blocks, and circuit boards.

Conclusions:

The developed method offers a powerful tool for advanced surface metrology.
This technique enhances the capabilities of white-light interferometry for precise surface characterization.