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RISE: robust iterative surface extension for sub-nanometer X-ray mirror fabrication.

Tianyi Wang, Lei Huang, Heejoo Choi

    Optics Express
    |May 14, 2021
    PubMed
    Summary
    This summary is machine-generated.

    A new Robust Iterative Surface Extension (RISE) method improves X-ray mirror fabrication by accurately extending surface data. This technique achieves sub-nanometer precision, crucial for advanced optics in synchrotron and free electron laser facilities.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Metrology

    Background:

    • Precision optics, like X-ray mirrors, are vital for advanced facilities such as synchrotrons and free electron lasers.
    • Achieving sub-nanometer surface accuracy (RMS) in the Clear Aperture (CA) is essential for diffraction-limited X-ray imaging.
    • Current surface extension methods struggle with boundary errors and noise, hindering sub-nanometer polishing.

    Purpose of the Study:

    • To develop a novel surface extension method for X-ray mirrors that overcomes limitations of existing techniques.
    • To enable the fabrication of X-ray optics with sub-nanometer surface precision.
    • To improve the accuracy of dwell time calculation in polishing processes.

    Main Methods:

    • Proposed a Robust Iterative Surface Extension (RISE) method utilizing a data fitting strategy.
    • Modeled figure errors in the Clear Aperture (CA) using orthogonal polynomials, fitting only correctable errors.
    • Implemented iterative refinement of dwell time, incorporating boundary conditions to compensate for extension and deconvolution errors.

    Main Results:

    • The RISE method significantly reduces figure error residuals in the CA.
    • The total dwell time increase was negligible.
    • Experimental verification showed figure errors improving from over 190 nm RMS to below 0.71 nm RMS for 10 mm x 80 mm CAs.

    Conclusions:

    • RISE is the first data fitting-based surface extension method for precision optics.
    • RISE is the first method to optimize dwell time through iterative extension.
    • The method effectively enables sub-nanometer level X-ray mirror fabrication, meeting stringent precision requirements.