Shaping convex edges in borosilicate glass by single pass perforation with an Airy beam

We demonstrate curved modifications with lengths of up to 2 mm within borosilicate glass produced by single 1030 nm picosecond laser shots with an Airy beam profile. Plasma ignition in the sidelobes of the beam as well as surface damage prove to be the crucial limitations for confined bulk energy deposition on a curved trajectory. A combined experimental and numerical analysis reveals optimum laser parameters for confined bulk energy deposition. This way, we achieved single pass perforation of a 525 µm thick glass sheet and separation by a subsequent etching step, resulting in a well-defined convex edge down to a radius of curvature of 774 µm.