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Time Multiplexing Super Resolving Technique for Imaging from a Moving Platform
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The EBSD spatial resolution of a Timepix-based detector in a tilt-free geometry
A L Marshall1, J Holzer2, P Stejskal3
1Department of Mechanical Engineering Sciences, The University of Surrey, Guildford, GU2 7XH; Thermo Fisher Scientific, Unit 24 Birches Industrial Estate, East Grinstead, UK, RH19 1UB.
Ultramicroscopy
|May 15, 2021
Summary
This study introduces a new tilt-free geometry for electron backscatter diffraction (EBSD) using a direct electron detection (DED) sensor. This method enhances spatial resolution for analyzing large samples, achieving results between 22-46 nm.
Area of Science:
- Materials Science
- Crystallography
- Electron Microscopy
Background:
- Traditional Electron Backscattering Diffraction (EBSD) often requires sample tilting, posing challenges for large specimens and spatial resolution.
- Direct Electron Detection (DED) sensors offer new possibilities for EBSD data acquisition.
- Revisiting normal incidence EBSD with DED sensors can improve data collection safety and resolution.
Purpose of the Study:
- To present a fully operational Direct Electron Detection (DED) EBSD system in a novel tilt-free geometry.
- To evaluate the physical spatial resolution of this DED EBSD system.
- To compare two distinct methods for estimating spatial resolution in this configuration.
Main Methods:
- Utilized a horizontal sample and parallel EBSD detector sensor in a tilt-free geometry.
- Employed a Molybdenum bicrystal with a specific twin boundary (Σ=3[101]{121}) for resolution testing.
- Measured spatial resolution using pattern quality metrics and normalized cross-correlation coefficients at various accelerating voltages (8-20 kV).
Main Results:
- The tilt-free DED EBSD system was demonstrated to be fully operational.
- Spatial resolution was determined to be approximately 22-38 nm via the pattern quality method.
- Spatial resolution was found to be approximately 31-46 nm using the normalized cross-correlation method.
Conclusions:
- The tilt-free geometry with DED sensors is effective for EBSD analysis, improving safety and longitudinal spatial resolution for large areas.
- The study successfully quantified the spatial resolution achievable with this new system.
- Both pattern quality and cross-correlation methods provide reliable estimates of spatial resolution in this configuration.
